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Nikkei
@r.nikkei.com
·
2 hours
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キヤノン、ハンコ技術で半導体ウエハーを平らに 凹凸5ナノ以下 - 日本経済新聞
キヤノンは、半導体製造工程でウエハー表面を平坦化する新技術を発表。インクジェットで樹脂を吹き付け、ガラス板で「ハンコ」のように押し平らにする。表面の凹凸を5ナノメートル以下に抑え、先端半導体の歩留まり向上を目指す。2027年頃の製品化を目指し、新市場を開拓する。
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